Temperature regulation in rapid thermal processes applied to semiconductors manufacturing

This project was performed in collaboration with a semiconductor manufacturing company in Saint-Petersburg, Russia. The project’s goal was to provide accurate temperature regulation in rapid thermal processes applied to vapor deposition processing. To solve the problem, we have developed a system identification procedure and then successfully used a robust passivity-based controller. Our industrial collaborators appreciated the provided accuracy as a significant impact on the manufacturing process.

The results of the project were also a part of a Ph.D. thesis prepared under my supervision by Aleksandr Kapitonov. Aleksandr successfully defended the thesis in 2015.